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"COMA Research Institute"is at the center of Coma Technology

which leads the Semiconductor and Display equipment Industries and continues to
advance its capabilities in developing core materials and components.

Fields of research

  • 01

    SAPPHIRE PARTS

    Sapphire Etch Ring / Focus Ring / Top Ring etc.

    Advanced flawless Sapphire Bonding Technology.

    Unique Sapphire Tube production technology.

    Localized Technology for Sapphire Dome.

  • 02

    CERAMIC PARTS

    Manufacture of high strength Porous Ceramic with high porosity.

    Manufacturing vacuum chuck capable of uniform adsorption without generating particles.

    Manufacturing Technology of AlN(Aluminum Nitride) with Y2O3(Yttrium Oxide) Removed.

  • 03

    DIAMOND PARTS

    Diamond Polishing Technology.

    Diamond Flattening Technology.

  • 04

    SILICON PARTS

    Silicon Cleaning Technology.

    Silicon Optical Polishing Technology.

    Silicon Lapping Technology.

    Silicon Acid Etching Technology.

Based on creative innovation activities and aggressive R&D culture, Coma Technology Co., Ltd.
continues to realize its dream of making world-class parts and materials used
in the Semiconductor and Display Industries.